Skip to content

Research at St Andrews

Optical lithography technique for the fabrication of devices from mechanically exfoliated two-dimensional materials

Research output: Contribution to journalArticlepeer-review

Author(s)

Rui Zhang, Tao Chen, Andrew Bunting, Rebecca Cheung

School/Research organisations

Abstract

Optical lithography technique has been applied to fabricate devices from atomically thin sheets, exfoliated mechanically from kish graphite, bulk MoS2 and WSe2. During the fabrication processes, the exfoliated graphene, few-layer MoS2 and WSe2 sheets have been patterned into specific shapes as required and metal contacts have been deposited on these two-dimensional sheets to make field effect devices with different structures. The key to the successful implementation of the technique is the appropriate alignment mark design, which can solve the problems of aligning photomasks to the random location, orientation and irregular shape exfoliated two-dimensional sheets on the substrates. Raman characterization performed on the patterned two-dimensional sheets after the fabrication processes shows that little defects have been introduced during fabrication. Field effect has been observed from I-V characteristics with the highly doped silicon substrate as the back gate. The extracted field effect hole and electron mobilities of graphene are ~ 1010 cm2 V-1 s-1 and ~ 3550 cm2 V-1 s-1 respectively; and the field effect carrier mobilities of MoS2 and WSe2 are ~ 0.06 cm2 V-1 s-1 and ~ 0.03 cm2 V-1 s-1, separately, which are comparable with experimental results of other reports.
Close

Details

Original languageEnglish
Pages (from-to)62-68
Number of pages7
JournalMicroelectronic Engineering
Volume154
Early online date26 Jan 2016
DOIs
Publication statusPublished - 25 Mar 2016

    Research areas

  • Graphene, Optical lithography, Reactive ion etching (RIE), Transition metal dichalcogenides (TMDs), Two-dimensional (2D) electronics

Discover related content
Find related publications, people, projects and more using interactive charts.

View graph of relations

Related by author

  1. Fabrication and characterisation of suspended microstructures of tantalum

    Al-Masha'Al, A., Mastropaolo, E., Bunting, A., Dunare, C. & Cheung, R., Jan 2017, In: Journal of Micromechanics and Microengineering. 27, 1, 9 p., 015020.

    Research output: Contribution to journalArticlepeer-review

  2. Human astrocytic grid networks patterned in parylene-C inlayed SiO2 trenches

    Jordan, M. D., Raos, B. J., Bunting, A. S., Murray, A. F., Graham, E. S. & Unsworth, C. P., Oct 2016, In: Biomaterials. 105, p. 117-126 10 p.

    Research output: Contribution to journalArticlepeer-review

  3. Test structures for the characterisation of conductive carbon produced from photoresist

    Scarfi, S., Smith, S., Tabasnikov, A., Schmuser, I., Blair, E., Bunting, A. S., Walton, A. J., Murray, A. F. & Terry, J. G., 20 May 2016, 2016 29th IEEE International Conference on Microelectronic Test Structures, ICMTS 2016 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., Vol. 2016-May. p. 184-189 6 p. 7476204

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  4. Evaluation of residual stress in sputtered tantalum thin-film

    Al-Masha'al, A., Bunting, A. & Cheung, R., 15 May 2016, In: Applied Surface Science. 371, p. 571-575 5 p.

    Research output: Contribution to journalArticlepeer-review

  5. Fabrication of electrodeposited Ni-Fe cantilevers for magnetic MEMS switch applications

    Schiavone, G., Bunting, A. S., Desmulliez, M. P. Y. & Walton, A. J., 1 Aug 2015, In: Journal of Microelectromechanical Systems. 24, 4, p. 870-879 10 p., 6902752.

    Research output: Contribution to journalArticlepeer-review

Related by journal

  1. Low frequency graphene resonators for acoustic sensing

    Grady, E., Mastropaolo, E., Chen, T., Bunting, A. & Cheung, R., 1 May 2014, In: Microelectronic Engineering. 119, p. 105-108 4 p.

    Research output: Contribution to journalArticlepeer-review

  2. Design and fabrication of high-efficiency fibre couplers for nanophotonic devices

    Beggs, D. M., Ayre, M., Gallagher, D. F. G. & Krauss, T. F., May 2007, In: Microelectronic Engineering. 84, p. 1446-1449 4 p.

    Research output: Contribution to journalArticlepeer-review

  3. Shot shifting for nanophotonic applications

    Pagnotta, G., O'Faolain, L., O'Brien, D. & Krauss, T. F., May 2007, In: Microelectronic Engineering. 84, p. 1463-1466 4 p.

    Research output: Contribution to journalArticlepeer-review

  4. Use of the `mist' (liquid-source) deposition system to produce new high-dielectric devices: ferroelectric-filled photonic crystals and Hf-oxide and related buffer layers for ferroelectric-gate FETs

    Morrison, F. D., Scott, JF., Alexe, M., Leedham, TJ., Tatsuta, T. & Tsuji, O., Apr 2003, In: Microelectronic Engineering. 66, 1-4, p. 591-599 9 p.

    Research output: Contribution to journalArticlepeer-review

ID: 258196895

Top